Hunting the picometer - Most accurate mirrors of the world to continue Moore's law

The demand for smaller and more energy-efficient microchips is key for numerous technological advancements, from fast communication to autonomous driving.To support this thirst for chips and to continue Moores law, the ground-breaking developments of ZEISS optics play a key role. In this talk, an overview over the different generations of lithography optics of ZEISS is given. Applications and current developments are discussed. Insights into the challenges in production and operation of optics for extreme ultraviolet (EUV) radiation are presented.