Bulk and surface inhomogeneity of r.f. sputtered ITO films: an ellipsometric study
- Forschungszentrum Casaccia, Labor für optische Beschichtungen, Agenzia Nazionale per le Nuove Tecnologie, l'Energia e lo Sviluppo Economico Sostenibile (Italien)
Tin-doped indium oxide (ITO) films have been prepared by r.f. sputtering technique in pure Ar and Ar+O2 atmospheres. Additional substrate heating during the deposition was used for a half of the samples. The influence of both deposition conditions and post-annealing treatment on film inhomogeneity was studied using multiangle spectroscopic ellipsometry. The structural and microstructural properties of the ITO films have been compared to the film inhomogeneity values.
@inproceedings{krasilnikovasytchkova2009p27,
author = {Krasilnikova Sytchkova, Anna and Schutzmann, Stefano},
title = {{Bulk and surface inhomogeneity of r.f. sputtered ITO films: an ellipsometric study}},
booktitle = {DGaO-Proceedings 2009},
series = {DGaO-Proceedings},
eventtitle = {110. Jahrestagung der DGaO},
eventdate = {2009-06-02/2009-06-05},
venue = {Brescia},
publisher = {Deutsche Gesellschaft für angewandte Optik e.V.},
year = {2009},
pages = {P27},
url = {https://dgao-proceedings.de/paper/110-p27}
}
110. Jahrestagung der DGaO · Brescia · 2009