Bulk and surface inhomogeneity of r.f. sputtered ITO films: an ellipsometric study
- Forschungszentrum Casaccia, Labor für optische Beschichtungen, Agenzia Nazionale per le Nuove Tecnologie, l'Energia e lo Sviluppo Economico Sostenibile
Tin-doped indium oxide (ITO) films have been prepared by r.f. sputtering technique in pure Ar and Ar+O2 atmospheres. Additional substrate heating during the deposition was used for a half of the samples. The influence of both deposition conditions and post-annealing treatment on film inhomogeneity was studied using multiangle spectroscopic ellipsometry. The structural and microstructural properties of the ITO films have been compared to the film inhomogeneity values.
@inproceedings{dgao110-p27,
title = {Bulk and surface inhomogeneity of r.f. sputtered ITO films: an ellipsometric study},
author = {Anna Krasilnikova Sytchkova, Stefano Schutzmann},
booktitle = {DGaO-Proceedings, 110. Jahrestagung},
year = {2009},
publisher = {Deutsche Gesellschaft für angewandte Optik e.V.},
issn = {1614-8436},
note = {Poster P27}
}
110. Jahrestagung der DGaO · Brescia · 2009