DGaO·Proceedings ISSN 1614-8436
EN

Sapna Shukla

Carl Zeiss AG

1 Beitrag

A27 · Vortrag · 113. Tagung (2012)

Nanometrology of molded sub-µm structures by means of light scattering

F. Widulle, V. D. Calzadilla, S. Shukla, B. H. Kleemann