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ISSN 1614-8436
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Sapna Shukla
Sapna Shukla
Carl Zeiss AG
1 paper
A27 · Talk · 113. Conference (2012)
Nanometrology of molded sub-µm structures by means of light scattering
F. Widulle, V. D. Calzadilla, S. Shukla, B. H. Kleemann