Fabrication of subwavelength-structured hollow waveguide array by two-photon polymerization
- 1Angewandte Lasertechnik und Photonik, Technische Hochschule Aschaffenburg
- 2Lehrgebiet Mikro- und Nanophotonik, FernUniversität in Hagen
andre [dot] edelmann [at] fernuni-hagen [dot] de
The fabrication of a subwavelength-structured hollow waveguide array is discussed. We employ a two-photon polymerization process to generate a negative sample of the target structure in a photo polymerizable resin. After developing the resin, gold is electrodeposited into the lithographically opened areas to fabricate the metallic structure. A free standing metallic hollow waveguide array is achieved by removing the unexposed resin. The complete array consists of around 1000 x 2000 subwavelength hollow waveguides with a dimension of 600 nm x 800 nm and a height of 2.9 µm. The free-standing metallic structure features an aspect ratio of 1:10. The hollow waveguide array provides a phase shift between the vertical and horizontal mode and may thus be used as a polarization-converting element.
@inproceedings{belle2015a26,
author = {Belle, Stefan and Edelmann, André and Hellmann, Ralf and Jahns, Jürgen},
title = {{Fabrication of subwavelength-structured hollow waveguide array by two-photon polymerization}},
booktitle = {DGaO-Proceedings 2015},
series = {DGaO-Proceedings},
eventtitle = {116. Jahrestagung der DGaO},
eventdate = {2015-05-27/2015-05-29},
venue = {Brno},
publisher = {Deutsche Gesellschaft für angewandte Optik e.V.},
year = {2015},
pages = {A26},
url = {https://dgao-proceedings.de/paper/116-a26}
}