Crossed fringe pattern - a novel tool for 3D metrology

Yuankun Liu1, Zheng Yang and G. Häusler2
  1. 1Fakultät für Optoelektronik, Sichuan-Universität (China)
  2. 2Institut für Optik, Information und Photonik, Friedrich-Alexander-Universität Erlangen-Nürnberg

yuankun_liu [at] hotmail [dot] com

Phase-measuring deflectometry measures the two components of the local surface gradients via displaying a sequence of two orthogonal sinusoidal grid patterns separately. The necessity of a sequential process can be avoided by a crossed fringe pattern. With this pattern, we will demonstrate single-shot (real-time) deflectometry. Furthermore, we will demonstrate the possibility of phase shifting with this pattern. An N-phase-shift is possible for BOTH components (x and y) with only N exposures, instead of 2N exposures, which are necessary for classic deflectometry. An interesting option of the new method is: The crossed fringe pattern can be printed on a slide and the phase shifting can be realized by just performing a (single-direction) mechanical shift of the slide. We will demonstrate this novel phase-shifting technique for deflectometry, as well as for structured-illumination microscopy, and discuss the potentials and the limits of the novel method.

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@inproceedings{liu2014b28,
  author     = {Liu, Yuankun and {Yang and G. Häusler}, Zheng},
  title      = {{Crossed fringe pattern - a novel tool for 3D metrology}},
  booktitle  = {DGaO-Proceedings 2014},
  series     = {DGaO-Proceedings},
  eventtitle = {115. Jahrestagung der DGaO},
  eventdate  = {2014-06-11/2014-06-14},
  venue      = {Karlsruhe},
  publisher  = {Deutsche Gesellschaft für angewandte Optik e.V.},
  year       = {2014},
  pages      = {B28},
  url        = {https://dgao-proceedings.de/paper/115-b28}
}
115. Jahrestagung der DGaO · Karlsruhe · 2014