Microoptical coupling of organic photodiodes
- Lichttechnisches Institut, Karlsruher Institut für Technologie (KIT)
We demonstrate the use of a novel method of hybrid 1- and 2-photon lithography for the fabrication of molded microoptics for the out-of-plane coupling of planar optical waveguides into organic photodiodes. By combining two different lithography methods using a fluorescence based alignment method we combine planar structures on the cm-scale with 3D nanostructures. Together with a facial fabrication method for waveguides based on a DUV-induced refractive index increase in PDMS, complete microoptical systems can be easily prototyped and replicated. The applicability of the concept for out-of-plane coupling is shown with a organic photodiode. This promises new ways to fabricate 3D microoptical systems and could lead to shorter development cycles and cheaper device fabrication.