A parallel, grey-scale direct-writer for micro-optics and microstructures
- Laboratory for Micro-optics (IMTEK), University of Freiburg
A novel method for fabricating diffractive microstructures is reported. By using a parallel direct-write technique based on a liquid crystal display, arbitrary structures with micrometer dimensions may be fabricated. Both binary and grey-scale structures can be made by direct two-dimensional modulation of the exposure with the LC display. A broadband UV lamp allows illumination of a variety of photoresists, including SU-8 or hybrid xerogels. With this method, creation of custom-made diffractive optics such as kinoforms, gratings or micro-lenses is inexpensive, fast and easy. Compared to existing manufacturing techniques, this direct-writing method simplifies component development by reducing the design-to-fabrication time and by not requiring cleanroom facilities.
@inproceedings{glasenapp2005b14,
author = {Glasenapp, Carsten and Zappe, Hans},
title = {{A parallel, grey-scale direct-writer for micro-optics and microstructures}},
booktitle = {DGaO-Proceedings 2005},
series = {DGaO-Proceedings},
eventtitle = {106. Jahrestagung der DGaO},
eventdate = {2005-05-17/2005-05-20},
venue = {Wrocław},
publisher = {Deutsche Gesellschaft für angewandte Optik e.V.},
year = {2005},
pages = {B14},
url = {https://dgao-proceedings.de/paper/106-b14}
}