Spatial coherence profilometry

We present an optical interferometric sensor for measuring the surface height profile of an object. The principle of the measurement method is based on spatial coherence. Thus this measurement method provides an analogy to white-light interferometry, the described method does not require a broadband light source, the interferometer is illuminated by a quasi-monochromatic light source. A CCD camera is used at the output of the interferometer. The behavior of the coherence function is measured in each point of the surface and the height profile is obtained in the course of one measurement procedure. The scanning in the lateral direction is not necessary. Experimental results of the described measurement method are presented.