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ISSN 1614-8436
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S. Francés
S. Francés
Fraunhofer-Institut für Photonische Mikrosysteme IPMS, Fraunhofer Institute for Photonic Microsystems IPMS
1 paper
B34 · Talk · 118. Conference (2017)
White light interferometry on large MEMS arrays
C. Skupsch, S. Wolschke, S. Francés, M. Wagner