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DGaO
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Proceedings
ISSN 1614-8436
DE
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M. Kugler
M. Kugler
Optical Systems Engineering, University of Applied Sciences Ravensburg-Weingarten
1 paper
P55 · Poster · 114. Conference (2013)
DUV- Lithografieobjektiv zur Mikrostrukturierung
M. Kugler, S. Lampen, M. Pfeffer