Nitish Kumar

Forschungsgruppe Optik, Technische Universiteit Delft

2 Beiträge

P13 · Poster · 114. Tagung (2013)

Coherent Fourier Scatterometry combined with Interferometry

S. Roy, N. Kumar, S. F. Pereira, H. P. Urbach

B34 · Vortrag · 113. Tagung (2012)

Experimental Validation of the Extended-Nijboer-Zernike (ENZ) based Aberration Retrieval Method for Microscope Objectives

A. Wiegmann, S. van Haver, N. Kumar, S. F. Pereira