Cas van Nuenen

ASML (Netherlands)

1 paper

A7 · Talk · 113. Conference (2012)

Performance of FlexRay, a fully programmable Illumination system for generation of Freeform Sources on high NA immersion systems

M. Mulder, A. Engelen, O. Noordman, G. Streutker, B. van Drieenhuizen, C. van Nuenen, W. Endendijk, J. Verbeeck, W. Bouman, A. Bouma, R. Kazinczi, R. Socha D. Jürgens, J. Zimmermann, B. Trauter J. Bekaert, B. Laenens D. Corliss, G. McIntyre