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DGaO
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Proceedings
ISSN 1614-8436
DE
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Akiko Kato
Akiko Kato
Physikalisch-Technische Bundesanstalt, Physikalisch-Technische Bundesanstalt (German National Metrology Institute)
1 paper
A28 · Talk · 113. Conference (2012)
Towards traceability in scatterometric-optical dimensional metrology for optical lithography
B. Bodermann, J. Endres, H. Gross, M.-A. Henn, A. Kato, F. Scholze, M. Wurm