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Proceedings
ISSN 1614-8436
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Xinchang Zou
Xinchang Zou
Institute of Process Measurement and Sensor Technology, Technische Universität Ilmenau
1 paper
P10 · Poster · 126. Conference (2025)
Pre-Development Positional Metrology for Exposed Photoresist Patterns Using a High-Sensitivity Focus Sensor Integrated with a Nanopositioning System
X. Zou, T. Kissinger